Clean Room Humidity Range

Like humidity levels it s important to maintain a standard temperature in cleanrooms to keep employees comfortable.

Clean room humidity range. Humidity in clean rooms clean rooms in general. As an example humidity is relative it s relative to the temperature it s at. When cleanroom cleaning staff or technicians shiver or even sweat they release a higher amount of particles into your cleanroom. That translates again into the cost of construction and the cost of operating your clean room.

A clean room is a manufacturing environment that has a low level of environmental pollutants such as dust airborne microbes aerosol particles and chemical vapors. If you were to set your temperature at 70 degrees and 50 relative humidity at 68 degrees that would be 55 relative humidity. This means that in most facilities the cleanrooms air handling units ahu consume over 60 of all the site power. Relative humidity in a semiconductor cleanroom is typically controlled to a target value somewhere within the 30 to 50 percent range and with tolerances as narrow as 1 percent for some areas such as photolithography or even less for deep ultraviolet processing duv and relaxing to.

The reason why their comfort matters is even more interesting. Some clean rooms ar e entire. Humidity in clean rooms clean rooms in general a clean room is a manufactur ing environment that has a low level of environmental poll utants such as dust airborn e microbes aerosol particles cand chemical vapors. Relative humidity is one of the environmental conditions usually specified for cleanroom operations.